A brief analysis of emerging MEMS and sensor technologies worthy of attention in recent years

When conducting industry research and forecasts, market analysts typically collect data from hundreds of companies to provide valuable intelligence about existing technologies and identify short-term business opportunities. As a MEMS and sensor consulting firm for a variety of commercial applications, clients often ask, "What technology or product will be popular in the future?" Measuring the market prospects of an emerging technology 5 to 10 years after commercialization often requires a different research strategy.

History tells us that most of today's blockbuster MEMS products were born as academic research results. Those entrepreneurs, with millions of dollars in grants and years of hard work, were able to turn proof-of-concept research into new commercial products. To identify those emerging and promising technologies, we need to focus directly on their source: academic conferences and journal literature.

Commercialization time of a typical MEMS product

Chirp Microsystems is strong evidence of this approach: In a 2012 academic presentation on emerging technologies, Dr. Alissa M. Fitzgerald, co-founder and CEO of AM Fitzgerald & Associates, highlighted UC Berkeley and California University Davis study on "Ultrasonic Ranging and Angle Estimation in Air Using Aluminum Nitride (AlN) MEMS Transducers." Shortly after the article was published, the authors formed Chirp Microsystems to commercialize their technology for gesture recognition and fingerprint recognition applications. After five years of research and development, Chirp Microsystems' products officially entered the market. In February 2018, global supply giant TDK acquired Chirp Microsystems, highlighting the company's commercial potential, as previously reported by Memes Consulting. This year, at the Hilton Head Workshop on Solid State Sensors, Actuators and Microsystems, Dr. Alissa M. Fitzgerald reviewed more than 100 papers from top researchers in the industry representing the most noteworthy technologies in the field. Dr. Alissa M. Fitzgerald's selection criteria include: business relevance; solutions to known or anticipated problems; breakthrough technologies. Based on these research papers and selection criteria, Dr. Alissa M. Fitzgerald summarizes the following emerging technologies of interest: Event-Driven Sensors: Motion, thermal, and other cleverly designed silicon-based MEMS devices that achieve zero power consumption during standby. Mechanical movement or thermal trigger events close contacts within the sensor to activate its circuitry and sense it. Such sensors use existing manufacturing methods, so they could be commercialized within five years for applications such as event monitoring and security. (Related research institutions: University of Texas at Dallas, Northeastern University)

Standby zero-power MEMS accelerometer, the device circuit mechanically closes when the acceleration threshold is reached Image Credit: University of Texas at Dallas

MEMS infrared detector with zero power consumption on standby Image source: Northeastern University

According to previous reports from Memes Consulting, a research team led by Northeastern University professor Matteo Rinaldi developed this zero-power infrared detector, which can maintain a zero-power sleep state before a meaningful measured signal appears. After the infrared characteristic signal reaches the device, it uses its own energy to drive a thermal micro-machine switch, and then turns on the load circuit to start working, so that the entire sensor node can only be "wake up" when a specific infrared spectrum appears.

Advances in PZT deposition and CMOS process integration for thin-film piezoelectric resonators can be used to build radio frequency (RF) filtered acoustic waveguides in 5G applications. This new filter design using an existing scalable process is ready for commercialization. (Related research institutions: Purdue University, Texas Instruments)

Acoustic waveguide CMOS resonator based on PZT FeCAP (piezoelectric ferroelectric capacitor) Image credits: Purdue University, Texas Instruments

In vivo wireless communication

MEMS ultrasonic transceivers, fabricated from aluminum nitride (AlN), are capable of sending data directly through the human body at Mbit/s data transfer rates. With the development of many kinds of human implants or wearable medical device network, this innovation can realize medical-grade and safe wireless communication inside the body. This early-stage study still requires in vivo validation, and development and regulatory approval could take another 10 years or more. (Related research institutions: Northeastern University, USA)

Piezoelectric MEMS Ultrasound Transducer (PMUT)-Based Ultrasound In-vivo Transceiver Image Credit: Northeastern University

Screens and 3D printed sensors

One representative example of the many exciting innovations utilizing screens and 3D printed sensors is the potentiometric nitrate soil sensor. The sensor is low-cost, biodegradable, and can be deployed in large areas to monitor soil quality on farms. However, screens and 3D printed sensing devices are currently mostly made using desktop or hobbyist tools, so new manufacturing equipment and infrastructure must be developed before commercial production is possible. (Related research institutions: Purdue University)

Nitrate Soil Sensor Image Credit: Purdue University

Biodegradable Battery SUNY Binghamton has developed a paper-based battery that can deliver 0.5 uW of electricity by cleverly using bacterial metabolism as an electrolyte. These batteries can dissolve in water and could one day be used to power temporary medical implants or biodegradable sensors. This exciting proof-of-concept prototype also required extensive process development and new manufacturing infrastructure. (Related research institutions: State University of New York at Binghamton)

A paper-based battery dissolves after being immersed in water for 60 minutes Credit: SUNY Binghamton

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